Horizontal Production Furnaces

TS 6 & TS 8 series medium & high volume production furnace systems for 100 mm up to 200 mm wafers3-4 tube furnace with flatzones of 600 - 1100 mm

Temperature range available 380 - 1350 ^oC

Optional Fast cool down system, for controlled ramp down range 0 - 20 ^oC /min., which reduces the proces time

Automatic loading by Cantilever or Softlander system.

Wafer handling system available: S300 automatic full batch elevator system can be interfaced with:

• Cassette to cassette loading system

• Smif loading system

• Wafer transfer systems

Back mounted and L shaped gas source cabinet available

High quality, performance and full support

Control system consisting of:

• Digital Process Controller (DPC)

• Digital Temperature Controller (DTC)

• Colour TFT touchscreen

Tempress Data Management System (TSC system)