TS-Series R&D

Tempress has installed over 40 R&D systems dedicated for Solar applications. Our furnace systems are available from small batch R&D processing up to high volume production sampling. From manual loaded systems up to fully automated equipment. Tempress R&D systems are used in many advanced research centers worldwide, for each silicon application in the Semiconductor, MEMS, LED and PV industry.

Key system features

  • Tempres 0196 MW annual capacity for typical system with POCl3, BBr3, Anneal/Oxidation, PECVD
  • New advanced Ox-Poly process available
  • Batch processing from 25 up to 1000 wafers per tube
  • Multipurpose atmospheric and CVD processing chambers available, applicable to any kind of silicon wafer
  • Modular set up of the equipment, 1-4 tubes. Empty tubes are retrofittable in the future with additional/new processing
  • Small footprint, manually loaded, or fully automated wafer transfer tools available


Customer benefits

  • From lab to fab: All processes are easily exchangeable from lab scale to high volume manufacturing
  • Full process and service support team available, direct from Tempress headquarters
  • High level of flexibility in choice of processing
  • All systems are backwards compatible. This guarantees full support at any time in the future for your Tempress furnace equipment
  • Access to the large in-house knowledge of semiconductor processing which can be applied to Solar cell manufacturing solutions