SPECTRUM POCl3

SPECTRUM (2154 x 756)
 

Key system features

  • Fine pitch back-to-back processing
  • Uniform process results over entire load
  • Integrated automation available

 

Customer benefits

  • Plug and play solution, proven in production
  • Tempress experience with >30GW installed POCl3 capacity worldwide
  • Fast process qualification, allowing steep production ramp-up