Author Archives: Tempress

TEMPRESS under new ownership

Tempress, a Netherlands-based furnaces solution provider, proudly announces that is has found new ownership in Dutch venture capital investor Innovation Industries and new management, after it was separated from the Amtech Group.

With the backing of Innovation Industries, the company has a solid financial base to continue to provide its customers in the power semiconductors, MEMS, photonics, solar and coating markets with innovative furnace solutions. Innovation Industries is an independent venture capital investor that provides accelerator capital and strategic support to Dutch High-Tech businesses.

“We are impressed with the people, products and knowledge at Tempress”, says Pieter de Groot, managing director. “Coming from the high-tech industry, it is not difficult to note that the company, with over 50 years of experience, has a very strong position in the thermal treatment market and that it has a lot to offer to its customers in terms of unique solutions with a wealth of high temperature diffusion and deposition technologies for both high volume production and R&D”, he adds. “With, Innovation Industries as investor, we can speed up our solution development and solidly grow our business with recently introduced platforms for semiconductor, solar and special coating industries.”, De Groot concludes.

Due to the COVID-19 travel restrictions it will be difficult to soon meet all customers and partners in person, but the new management will undertake all efforts to use the available communication technologies to continue the dialog. For this purpose, introduction videos where recorded for customers, partners and employees and video meetings are scheduled.

About Tempress
Tempress is located in the Netherlands. Tempress’ 50 years heritage in developing and producing diffusion and coating processes is a testament to the company’s flexibility, innovation, quality, and dedication. As a result, Tempress has shipped more than 1000 diffusion and deposition furnace systems for semiconductor, photonics, MEMS and solar applications. Semiconductor experience is the foundation for our technology and knowledge. In order to meet the market’s demand for more efficient and cost-effective applications, Tempress has developed strategic relationships with leading research institutes, universities, industry partners and our customers.

Our rich history enables us to deliver cutting-edge technology solutions supplemented with diffusion & deposition equipment and automation solutions to our large customer base. Our goal is to continue supporting our customers in their pursuit for their better products and lowest Cost of Ownership.

Find out more about Tempress at our website or LinkedIn-page.

For further questions please contact:
Mr. Pieter de Groot – Managing Director – pdegroot@tempress.nl
Mr. Rob de Jong – Area Sales Manager – rdejong@tempress.nl

Tempress and R2D ship first TS-Series furnace with fully automated wafer handler

Tempress and R2D are happy to announce the shipment of a fully automated diffusion furnace system to a Tier1 customer in Asia.  The Tempress high temperature diffusion TS-Series furnace is combined with a field proven R2D COMET-LISA wafer transfer system, a standard SMIF pod opener and a reliable robot for placing boats on paddles. This combination results in improved stability, flexibility and a higher throughput solution for our customers’ horizontal diffusion furnaces. The new automation setups are immediately available with SMIF/FOUP pod openers for 200/300 mm projects with SECS-GEM host interface communication. With continued automation requirements in the high temperature diffusion segment in semiconductors, Tempress and R2D expect significant order intake for new factory expansions as well as factory automation upgrades.

Launch of its Semi SPECTRUM 300 platform

Tempress is proudly announcing the launch of its Semi SPECTRUM 300 platform for high volume manufacturing in the semiconductor power industry. The system is dedicated for high temperature diffusion and oxidation and can also run a variety of CVD processes, on up to 300mm wafers. With its high system throughput it offers significant cost of ownership and cleanroom space benefits to our customers.

Recapitalized and refinanced Tempress continues into its next chapter

Tempress will continue as a stand alone company after the divestiture by Amtech Systems, Inc [as announced in the Amtech press release of January 28th]. Tempress will serve its customers with innovative thermal solutions for Semiconductors, Photonics and MEMS business from its Dutch operations and serve it’s Solar customers from Kunshan, PRC. 

Tempress was founded in 1967 and is based in Vaassen, The Netherlands. Tempress is customer oriented horizontal and vertical solar/semiconductor furnace equipment manufacturer. In 1994 the Company was acquired by Amtech Systems, Inc and divested in January 2020 as part of its change in strategic focus. Recently, Tempress has started a corporate restructuring to move its Solar horizontal furnace business to Kunshan in China. The Chinese operations started in June 2019 and has turned out to be a real success with customers running 24/7 production with the locally build furnaces. Further expansion of the Kunshan operation is expected in the coming period. Tempress is well capitalised and is well positioned to provide its customers with innovative solutions and services offering a wealth of high temperature diffusion and CVD solutions for high volume production and R&D.

First Tempress Chinese made furnace.

Tempress has installed and brought into production the first Tempress Chinese made furnace at an Asian Tier1 Solar manufacturer. The major milestone follows the transfer of the latest solar production platform from Vaassen, the Netherlands to its Chinese production location. Within a record installation time, in good cooperation with the customer, we were able to qualify the system and start production for the customer, according to Justin Sheng, service manager of Tempress China. 

The Tempress new solar production platform, which is now also produced in Kunshan, delivers unprecedented performance at the highest through-put for any horizontal furnace systems offered.

First Tempress Chinese made furnace

Tempress PECVD SiN key system features
• High cell throughput of 250 MW / system
• Uniform process over entire wafer load, by patented heating solution
• Low electricity usage (more than 40% reduction compared to competition), delivering lowest cost of ownership solution

Tempress BBr3 key system features
• High cell throughput of 100 MW / system
• Uniform process over entire wafer load, by best in class heating elements, with highest cell yield
• Low maintenance solution combined with high electrical cell yield, results in lowest cost of ownership for any boron diffusionTempress LPCVD ox-poly key system features
• High cell throughput of 250 MW / system
• Uniform process over entire wafer load, at the highest through-put available, for both undoped as well as doped polysilicon
• Low maintenance solution combined with high electrical cell yield, results in lowest cost of ownership

First solar production system manufactured in Kunshan

Tempress has finalized the manufacturing of the first production system in Kunshan. The major milestone follows the transfer of the latest solar production platform from Vaassen, the Netherlands to its Chinese production location. Within six months, performing a transfer, with new local suppliers, in a new production facility, with a new production crew, is a fantastic achievement by all the teams involved, according to Klaas van Achteren, operations manager of Tempress.

The Tempress new solar production platform, which is now also produced in Kunshan, delivers unprecedented performance at the highest through-put for any horizontal furnace systems offered.

Tempress PECVD SiN key system features
• High cell throughput of 250 MW / system
• Uniform process over entire wafer load, by patented heating solution
• Low electricity usage (more than 40% reduction compared to competition), delivering lowest cost of ownership solution

Tempress BBr3 key system features
• High cell throughput of 100 MW / system
• Uniform process over entire wafer load, by best in class heating elements, with highest cell yield
• Low maintenance solution combined with high electrical cell yield, results in lowest cost of ownership for any boron diffusion

Tempress LPCVD ox-poly key system features
• High cell throughput of 250 MW / system
• Uniform process over entire wafer load, at the highest through-put available, for both undoped as well as doped polysilicon
• Low maintenance solution combined with high electrical cell yield, results in lowest cost of ownership

PECVD systems order

Tempress has received a purchase order from a large solar cell manufacturer for PECVD silicon nitride furnaces. The Tempress PECVD system combines best in class uniformity deposition at highest system throughput for direct plasma deposition systems. This results in the lowest cost of ownership for our customers, according to Jeroen van Hapert, Business Director at Tempress.

The Tempress’ PECVD systems uses patented technology to achieve best in class color uniformity, underlining Tempress’ position as the global leader in direct plasma PECVD furnace technology.

Tempress PECVD key system features
• High cell throughput of 200 MW / system
• Uniform process over entire wafer load, by patented heating solution
• Low electricity usage (more than 40% reduction compared to competition)

Customer benefits
• Plug and play solution, proven in production
• Tempress recipe for multi- layer, PID free
• High uniformity with industry lowest cost of ownership
• Optional additional precursors for SiONx, TMA, et cetera

Tempress receives large n-type Solar order for boron diffusion furnaces

The company has received a large purchase order from a Tier 1 Solar cell manufacturer for boron diffusion furnaces. The Tempress BBr3 system combines high quality in Solar cell output with high system throughput. This results in the lowest cost of ownership for our customers, according to Jeroen van Hapert, Business Director at Tempress.

The third generation of Tempress’ BBr3 systems uses the latest Tempress SPECTRUM platform, thereby strengthening Tempress’ position as the global leader in BBr3 diffusion furnaces. Using its extensive experience in BBr3 high volume manufacturing, Tempress has again put a system on the market that outperforms competition furnace systems both in daily output as well as in reliability.

Tempress BBr3 Key system features
• High throughput >100 MW / system
• Uniform process results over entire load
• Integrated solution with fine pitch back-to-back automation available

Customer benefits
• Plug and play solution, proven in production
• Tempress recipe for Boron emitter formation without Boron Rich Layer
• Emitter formation for high-efficiency n-type solar cells
• Maximum uptime and lowest cost of ownership

About Tempress
Tempress is located in the Netherlands. Tempress’ 50 years of heritage in developing and producing diffusion equipment and related processes is a testament to the company’s flexibility, innovation, quality, and dedication. As a result, Tempress has shipped a commanding 30 GW of diffusion furnace systems for Solar applications. The Semiconductor experience is a fundament for our technology and knowledge. In order to meet the market’s demand for more efficient and cost-effective solar cells, Tempress has developed strategic relationships with leading Solar research institutes, universities, industry partners and our customers. This close collaboration is a technology enabler.

Our rich history enables us to deliver cutting-edge Solar technology supplemented with diffusion & deposition equipment and automation solutions to our large customer base. Our goal is to continue supporting our customers in their pursuit for higher efficiencies and the lowest Cost of Ownership.
Find out more about Tempress at our website or LinkedIn-page.