Automatic wafer handling.
Improve operator efficiency and process yield

Automatic wafer handling.

Do you want to profit from a limited operator interference and dependence and have a more stable and reliable process yield?​

The Tempress furnace platforms for medium and high-volume semiconductor manufacturing can be equipped with integrated boat handler and storage and fully automated wafer handling systems (cassette-to-cassette). The wafer handling systems are tailor made for high volume 200 or 300 mm wafer production. The automated wafer handling systems can be additionally upgraded with an integrated stocker function, RFID, SECS/GEM (E30-E300) and other customer specific options.​

Tempress automated wafer handler system features.

  • Reliable automatic wafer transfer from plastic cassettes (SMIF/FOUP) to individual boat or longboats​
  • Field proven Comet® wafer transfer​
  • Upgradable with flexible stocker unit​
  • Applicable for TS series V 200 mm and 300 mm systems​
  • Flexible interface for fab automation​.

Automated wafer handling options.

Want to know more about this topic? Please contact us so we can guide you through our extended range of (customized) automation offerings.

Tempress loadstation with LINA elevator

200 mm furnaces with integrated wafer/boat automation​

SMIF port with full automated wafer/boat transfer

300 mm FOUP ports for automated wafer/boat transfer​

  • OpenCasette/ SMIF/ FOUP / OHT loading
  • 150-300 mm flexible, Customized or integrated automation solutions
  • Automated wafer and/or boat transfer systems (casette to casette)
  • Fab communication via SEC/GEM E30 or E300
  • Other options: barcode readers, RFID, ionizer, notch aligner etc​

Related articles.

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the T-Team.

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