The furnace platforms for medium and high volume Semiconductor manufacturing can be equipped with integrated boat handler and storage and fully automated wafer handling systems. The wafer handling systems are tailor made for high volume production of 200 or 300mm wafers.
The automated wafer handling systems can be additionally upgraded with integrated stocker function, RFID, Secs-Gem and other customer specific options.
Tempress automated wafer handler system features:
- Reliable automatic wafer transfer from plastic cassettes to individual boat or longboats
- Field proven Comet® wafer transfer
- Upgradable with flexible stocker unit
- Applicable for both Spectrum 200/300 as well as TS series
- Limited operator interference
- Stable and reliable production
- Flexible interface for fab automation