A new launch

A new launch Tempress launches the TS Series V multipurpose thermal processing platform, providing ultimate process flexibility (diffusion, LPCVD, PECVD and ALD) within optimized cleanroom footprint. The TS Series V can process wafer sizes up to 300 mm and can be...

Fully automated wafer handler

Tempress and R2D are happy to announce the shipment of a fully automated diffusion furnace system to a Tier1 customer in Asia.  The Tempress high temperature diffusion TS-Series furnace is combined with a field proven R2D COMET-LISA wafer transfer system, a standard...