• MEMS/Photonics
Special applications requiring optimized furnace steps with high uniformity and specific process settings. TEOS, HTO (Doped) LPCVD Low loss – Low stress - Standard Nitride LPCVD Polysilicon ALD
The Small Batch Vertical Furnace (SBVF) can process wafers up to 200 mm
The TS series is Tempress’ versatile horizontal furnace system that is configurable to meet our customer demands in the semiconductor, solar, MEMS and photonics industries