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UPVfab silicon nitride LPCVD systems up to 8 inch wafers upgraded for low stress films
Valencia, Spain, and Vaassen, The Netherlands - UPVfab, the microfabrication facility at the Universitat Politècnica de València, has upgraded the low-pressure chemical vapor deposition (LPCVD) furnace on its system TS81003 manufactured by Tempress, to expand the...
Fully automated wafer handler
Tempress and R2D are happy to announce the shipment of a fully automated diffusion furnace system to a Tier1 customer in Asia. The Tempress high temperature diffusion TS-Series furnace is combined with a field proven R2D COMET-LISA wafer transfer system, a standard...
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