• Semiconductor
With more than 50 years experience and more than 1000 systems installed within the Semiconductor furnace industry, Tempress provides a broad range of process applications from small batch special applications up to high volume fully automated high temperature oxidation and diffusion. Semi- or full automation available Diffusion & (LP)CVD processes Both for R&D and industrial scale processes.
The Spectrum 200/300 platform is designed for high temperature processing in the semiconductor power and MEMS industries.
The Small Batch Vertical Furnace (SBVF) can process wafers up to 200 mm
The furnace platforms for medium and high volume Semiconductor manufacturing can be equipped with integrated boat handler and storage and fully automated wafer handling systems.