Tempress offers a multipurpose thermal processing platform that enables you to use a wide range of (semiconductor) diffusion and deposition technologies

VS Series.

Smaller batches, latest technology

The VS series vertical furnace is a very economic, scalable and small footprint solution for smaller batch (upto 75 wafers) wafer processing

TS Series V.
The multipurpose Thermal Processing Platform

The horizontal furnace TS series V is optimized for flexibility, multiple processes and cleanroom space.

Wafer Handling.
Do you want to profit from a limited operator interference and dependence and have a more stable and reliable process yield?

The Tempress furnace platforms for medium and high-volume semiconductor manufacturing can be equipped with integrated boat handler and storage and fully automated wafer handling systems (cassette-to-cassette).

Customer Care.

With highly qualified personnel, Tempress provides service of value to your business throughout the lifecycle of your furnace to ensure safe, cost-effective and high-uptime operations.

For more information on our services, spare parts, retrofits please click the button below.

Related articles.

Want to read more about this topic? Follow the link below for related articles

Diffusion oxidation icon

Diffusion processes.

Deposition LPCVD icon

LCPVD processes.

Atomic layer deposition ALD

Other processes.

Contact
the T-Team.
  • sales@tempress.nl
  • +31-578-699200
  • PRadeweg 31, 8171 MD, Vaassen