Smaller batches, latest technology
The VS series vertical furnace is a very economic, scalable and small footprint solution for smaller batch (upto 75 wafers) wafer processing
The horizontal furnace TS series V is optimized for flexibility, multiple processes and cleanroom space.
The Tempress furnace platforms for medium and high-volume semiconductor manufacturing can be equipped with integrated boat handler and storage and fully automated wafer handling systems (cassette-to-cassette).
With highly qualified personnel, Tempress provides service of value to your business throughout the lifecycle of your furnace to ensure safe, cost-effective and high-uptime operations.
For more information on our services, spare parts, retrofits please click the button below.
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