SPECTRUM 5 stack batch ALD system with up to 1800 wafer load per tube for the highest throughput batch ALD system in the market. Cost effective solution for  P-perc and advanced TOPCon emitter passivation.

Key features system:

  • 5 process tubes
  • Max 1800 wafer load per tube
  • Throughput >>10k wafers/system, depending on automation

Customer benefits:

  • Perfect step coverage
  • Excellent passivation; iVoc> 730mV
  • Efficient TMA consumption for lowest cost of ownership