SPECTRUM 5 stack batch ALD system with up to 1800 wafer load per tube for the highest throughput batch ALD system in the market. Cost effective solution for P-perc and advanced TOPCon emitter passivation.
Key features system:
- 5 process tubes
- Max 1800 wafer load per tube
- Throughput >>10k wafers/system, depending on automation
- Perfect step coverage
- Excellent passivation; iVoc> 730mV
- Efficient TMA consumption for lowest cost of ownership