The third generation of Tempress BBr3 systems uses the common Tempress SPECTRUM platform, thereby strengthening Tempress’ position as global leader in BBr3 diffusion furnaces. Using its extensive experience in BBr3 high volume manufacturing, Tempress has again put a system on the market that outruns conventional furnace systems both in daily output and reliability.

Key system features

  • High throughput >100 MW / system
  • Uniform process results over entire load
  • Integrated solution with fine pitch back-to-back automation available
  • Up to 210 mm wafer size

Customer benefits

  • Plug and play solution, proven in production
  • Tempress recipe for Boron emitter formation without Boron Rich Layer
  • Emitter formation for high-efficiency n-type solar cells
  • Maximum uptime and lowest cost of ownership