The spirit of progress.
Tempress deposition and diffusion solutions are used by leading companies in the semiconductor and advanced materials industry. Applications range from wafer manufacturing to MEMS, optoelectronic chip and power semiconductor production. Our solutions also play into non-wafer applications such as production of nano-materials that enhance performance of cathodes for EV batteries or coatings for membranes to clean waste streams.
Diffusion processes are used in semiconductor manufacturing to modify the electrical properties of the wafer material, typically by introducing dopant atoms into the wafer material from a chemical vapor source or by annealing the crystal defects. Tempress offers a wide range of diffusion processes from high temperature annealing (up to 1365°C ), wet and dry oxidation and Phosphorus and Boron doping with POCI3 and BBr3, to lower temperature (<500°C) sintering, alloying and annealing with up to 100% H2.
Deposition (CVD/ALD) processes are used to produce (thin) films of high quality and high-performance solid materials on a wafer. Typical applications can be found in the production of integrated circuits (ICs), micromechanical structures (MEMS), photonic devices and photovoltaic (solar cell) systems. Tempress offers Low Pressure CVD (LPCVD), that reduces unwanted gas-phase reactions and improves uniformity of the film across the wafer, Plasma Enhanced CVD (PECVD), allowing deposition at lower temperatures with increased deposition rates and Atomic Layer Deposition (ALD) for producing very thin, conformal films with control of the thickness and composition of the films possible at the atomic level.
Tempress offers a multipurpose thermal processing platform that enables you to use a wide range of (semiconductor) diffusion and deposition technologies.
TS Series V.
The TS v exceeds everything you expect it to be
The horizontal furnace TS series V is optimized for flexibility, multiple processes and cleanroom space. With its modular design the TS series V is available with up to four furnace stacks that can independently and simultaneously run a multitude of processes.
If you want to put something on a wafer, Tempress can help you
Do you want to profit from a reduced operator interference and dependence and have a more stable and reliable process yield?
We love it when a plan comes together.
“If you have a problem, if no one else can help, and if you can find them….maybe you can hire The T-Team.”
We believe that semiconductor technologies are critical to develop solutions to keep the world clean, connected and healthy.
We deliver deposition technologies to produce devices that enable the electrification of our transport, that connect people and things (IoT) and that improve health
we believe in absolute integrity.
we believe in teamwork and keeping our promises.
we believe in being bold and positive.
The Institute of Microelectronics of Barcelona (IMB-CNM, CSIC) is the largest institute in Spain dedicated to the research and development of Micro and Nano Technology (MNTs) and microsystems and with unique capacities of silicon technology.
Tempress launches the TS Series V multipurpose thermal processing platform, providing ultimate process flexibility (diffusion, LPCVD, PECVD and ALD) within optimized cleanroom footprint. The TS...
Tempress, a Netherlands-based furnaces solution provider, proudly announces that is has found new ownership in Dutch venture capital investor Innovation Industries and new management, after it was...
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